Influence of plasma-based ion implantation and deposition on the structure, internal stress and mechanical properties of nanocrystalline zrn coatings [Electronic resource] / A. V. Taran, I. E. Garkusha, V. S. Taran, R. M. Muratov, V. V. Starikov, A. A. Baturin, S. Romaniuk, A. G. Mamalis //
Nanotechnology Perceptions. - . - Vol. 16, Issue 1. - С. 56-63.. - DOI 10.4024/N16TA19A.ntp.16.01.
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